Proton beam lithography for 20nm and below (and above!)

 

                                   proton beam hits resist

                                 proton beam hits resist

ProScan is a new technology for maskless, direct-write proton-beam lithography. Utilizing particle accelerators fabricated on a chip, ProScan writes the entire width of a 300mm wafer using an array of 3 million parallel proton beams. Using low-energy protons are used to expose resist with 20nm pixels with minimal wafer heating, while maintaining current fab production rates of 100 wafers per hour.

                   Click here to read an overview of the Transmute ProScan.