Proton beam wafer Scanner
ProScan is a maskless, direct-write proton-beam lithography. Utilizing particle accelerators fabricated on a chip, ProScan writes the entire width of a 300mm wafer using an array of 3 million parallel proton beams. Low-energy protons are used to expose resist with 20nm pixels with minimal wafer heating, while maintaining current fab production rates of 100 wafers per hour.
The ProScan project has achieved multiple milestones including IP protection and preliminary system design. The next steps include prototype development and characterization. Please contact us to discuss any aspect of realizing the next generation of maskless wafer writing using millions of particle accelerators on a chip.