The accelerator chip, the ion Injector PCB, and the sensor block form the Accelerator Module. The accelerator chip is composed of the channel substrate and the logic chip. The logic chip has all the control logic that sends the write data to the proton gates. The Interface Board is a printed circuit board that has six 12-fiber connectors (total of 72 fiber data channels), power connectors, and the drift tube drive circuits. The five Zygo ZPS laser displacement interferometers control skew, height, and adjacent head distance.
Print Head / Exploded
The Accelerator Module is bonded to the Cooling Module and attached to the Nano Actuator drivers. The Cooling Module bonds four Coorstek Aluminum Nitride plates that distribute and channel the coolant to keep the accelerator at a constant temperate. The temperature must be kept within 0.1 degrees centigrade to meet the CD budget. The Nano Actuator consists of piezo-electric actuators that align the head to within 2nm using feedback from the interferometers and alignment fudicials on the wafer and chuck.
Nano Actuator Assembly
Surface A and B are on the same plane
Surface A is attached to Interface Board
Surface B is attached to Print Head Rail
Five Piezo actuators can move the flexure plate up/down along Z, rotate around Z, and align to neighbor.
The completed 20nm print head is able to write a one inch wide path on a wafer while maintaining its position in space. This means that all heads are interchangeable and do not need to be carefully installed.
Print Head Rail Assembly
Twelve print heads attached to a ZeroDur Rail. The heads are staggered such that the back head may write the first inch of the wafer and the front head is aligned to write the next inch. The data controller compensates for the distance between the heads.